Mechanically Coupled Comb Drive MEMS Stages
Paper in proceedings, 2008

An electrostatic large clear-aperture in-plane scanner with a novel actuation principle Is presented for fast and large stroke scanning applications. 9 μm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.

electrostatic actuation

Mechanical coupling

MEMS stage

Author

Aslihan Arslan

Koç University

Caglar Ataman

Koç University

Sven Holmström

Koç University

Karin Hedsten

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

H. Rahmi Seren

Koç University

Hakan Urey

Koç University

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS; Freiburg; Germany; 11 August 2008 through 14 August 2008

140-141

Subject Categories

Telecommunications

DOI

10.1109/OMEMS.2008.4607868

ISBN

978-142441918-0

More information

Created

10/6/2017