Electrostatic feedback for MEMS sensor for in situ TEM instrumentation
Paper in proceedings, 2008

A capacitive force sensor for in situ TEM instrumentation is investigated. In order to prevent movement of the suspended plate in the capacitive sensor force feedback has been investigated, primarily using CV measurements. A manual feedback has successfully been implemented and an analytical model using a serial and a parallel capacitor is presented.

Electrostatic force modeling

Force feedback

Force sensor

Author

Alexandra Nafari

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Ning Chang

Johan Angenete

Krister Svensson

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Eurosensors 2008

Subject Categories

Condensed Matter Physics

More information

Created

10/7/2017