Manufacturing of nanometer structures in YBa2Cu3O7 thin films using a carbon based multilayer mask
Paper i proceeding, 1995

A process method that will produce ion milled bridges and trenches of ultra small dimensions in YBa2Cu3O7(YBCO) thin films is presented. The method is based on electron beam lithography, reactive ion etching (RIE), ion milling and a multilayer mask, which consists of an electron resist and an amorphous carbon layer with intermediate niobium. Carbon has two unique properties that are used in the process. First, carbon can easily be reactive ion etched in an oxygen atmosphere, since the oxides of carbon are gases. Furthermore, carbon has an extremely low ion milling etching rate. The electron resist pattern is transferred to the niobium and the carbon layers by a reactive ion etching process with CF4 and O2 In such a way a durable carbon mask for ion milling is formed. When the ion milling is completed, the result of the process is 50-60 nm wide bridges and 30-60 nm wide trenches in 100 nm thick YBCO films.

barium compounds

yttrium compounds

superconducting thin films

high-temperature superconductors

masks

electron resists

sputter etching

nanostructured materials

Författare

Peter Larsson

Institutionen för mikroelektronik och nanovetenskap

Bengt Nilsson

Institutionen för fysik

Huai-ren Yi

Institutionen för fysik

Zdravko G. Ivanov

Institutionen för fysik

Applied Superconductivity 1995. Proceedings of EUCAS 1995, the Second European Conference on Applied Superconductivity

Vol. 2 935-938

Styrkeområden

Nanovetenskap och nanoteknik

Materialvetenskap

Ämneskategorier

Den kondenserade materiens fysik

ISBN

0750303484