Switchable and tunable bulk acoustic wave resonators based on BaxSr1-xTiO3 thin films
Doktorsavhandling, 2012

The main focus of this thesis is the study of a novel microwave component, the tunable thin film bulk acoustic wave resonator (TFBAR), based on ferroelectric BaxSr1-xTiO3 thin films. Conventional fixed frequency TFBARs, widely used for filtering applications in wireless communication systems, are based on ordinary piezoelectrics. The tunable TFBAR on the other hand utilizes the dc field induced piezoelectric effect in the ferroelectric film. This allows dc field tuning of the resonance frequency as well as switching between resonator and capacitor response. A brief introduction to the BaxSr1-xTiO3 material system is given, followed by results from thin films grown by pulsed laser deposition. Effects of substrate temperature and ambient gas pressure during growth are discussed. Resonator design and fabrication issues are covered, including studies of electrode configurations and acoustic mirror structures. Measurement results are presented in wide dc bias and temperature ranges. The achieved room temperature tuning range for a 5.7 GHz Ba0.25Sr0.75TiO3 TFBAR is 3.8% and the effective electromechanical coupling coefficient at maximum bias is 7.1%, with a Q-factor of 130. A switchable bandpass filter is considered as a possible application of BaxSr1-xTiO3 TFBARs. Simulated filter characteristics and preliminary results from fabricated filters are presented.

Ferroelectric thin films

field induced piezoelectric effect.

tunable microwave devices

bulk acoustic wave devices

piezoelectric resonators

Kollektorn (A423), MC2, Chalmers, Kemivägen 9, Göteborg
Opponent: Prof. Paul Muralt, EPFL, Switzerland


John Berge

Chalmers, Mikroteknologi och nanovetenskap (MC2), Terahertz- och millimetervågsteknik

Tunable Solidly Mounted Thin Film Bulk Acoustic Resonators Based on BaxSr1-xTiO3 Films

IEEE Microwave and Wireless Components Letters,; Vol. 17(2007)p. 655-657

Artikel i vetenskaplig tidskrift

The effect of Bragg reflectors on the electromechanical performance of parallel-plate ferroelectric capacitors

IOP Conference Series: Materials Science and Engineering - Fundamentals and Technology of Multifunctional Oxide Thin Films (Symposium G, EMRS 2009 Spring Meeting) 8–12 June 2009, Strasbourg, France,; Vol. 8(2010)p. 012011-

Paper i proceeding

Tunable bulk acoustic wave resonators based on Ba0.25Sr0.75TiO3 thin films and a HfO2/SiO2 Bragg reflector

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,; Vol. 58(2011)p. 2768-2771

Artikel i vetenskaplig tidskrift

The effect of growth temperature on the nanostructure and dielectric response of BaTiO3 ferroelectric films

Thin Solid Films,; Vol. 515(2007)p. 6302-6308

Artikel i vetenskaplig tidskrift


Nanovetenskap och nanoteknik



Annan materialteknik



Doktorsavhandlingar vid Chalmers tekniska högskola. Ny serie: 3324

Technical report MC2 - Department of Microtechnology and Nanoscience, Chalmers University of Technology: 215

Kollektorn (A423), MC2, Chalmers, Kemivägen 9, Göteborg

Opponent: Prof. Paul Muralt, EPFL, Switzerland