High efficiency grating-coupled surface-emitting semiconductor lasers
Licentiatavhandling, 1995
diffraction grating
chemically assisted ion beam etching
blazed grating
integrated optics
multilayer substrate reflector
semiconductor laser
grating-coupled surface-emitting laser
electron-beam lithography
waveguide grating coupler
nenofabrication
Författare
Niklas Eriksson
Institutionen för optoelektronik och elmätteknik
Ämneskategorier
Elektroteknik och elektronik
ISBN
91-7197-197-1
Technical report L - School of Electrical and Computer Engineering, Chalmers University of Technology. : 210