High efficiency grating-coupled surface-emitting semiconductor lasers
Licentiatavhandling, 1995

diffraction grating

chemically assisted ion beam etching

blazed grating

integrated optics

multilayer substrate reflector

semiconductor laser

grating-coupled surface-emitting laser

electron-beam lithography

waveguide grating coupler

nenofabrication

Författare

Niklas Eriksson

Institutionen för optoelektronik och elmätteknik

Ämneskategorier

Elektroteknik och elektronik

ISBN

91-7197-197-1

Technical report L - School of Electrical and Computer Engineering, Chalmers University of Technology. : 210