Loss balance in tunable ferroelectric FBARs
Paper i proceeding, 2013

Distinguishing between different loss mechanisms and their distribution between different parts of the Film Bulk Acoustic Wave Resonators (FBAR) is an issue. In this work a scaling rule (based on the analysis of the loss mechanisms) is proposed for initial specification of the losses in different structural components of the tunable FBARs. Simple ADS based calibration procedure is then applied allowing for correction of these losses and identifying the lossiest component. It is shown, in the provided example that the losses due to scattering at the roughness of the top Al electrode is dominating. Polishing of Al is proposed as a possible way of scattering losses reduction.

Q-factor

Ferroelectric

Tunable FBAR

Loss acoustic

Scattering loss

Författare

Spartak Gevorgian

Chalmers, Mikroteknologi och nanovetenskap (MC2), Terahertz- och millimetervågsteknik

Andrei Vorobiev

Chalmers, Mikroteknologi och nanovetenskap (MC2), Terahertz- och millimetervågsteknik

8th European Microwave Integrated Circuits Conference, EuMIC 2013 - Held as Part of 16th European Microwave Week, EuMW 2013; Nuremberg; Germany; 6 October 2013 through 8 October 2013

372-375

Infrastruktur

Nanotekniklaboratoriet

Ämneskategorier

Annan elektroteknik och elektronik

ISBN

978-287487032-3

Mer information

Skapat

2017-10-08