Impact of the electrode material and shape on performance of intrinsically tunable ferroelectric FBARs
Artikel i vetenskaplig tidskrift, 2014

Experiment-based analysis of losses in tunable ferroelectric xBiFeO 3-(1-x)BaTiO3 (BF-BT) film bulk acoustic wave resonators (FBARs) is reported. The Q-factors, effective coupling coefficients, and tunabilities are considered as functions of surface roughness of the ferroelectric film, the acoustic impedance and shape of the electrodes/ interconnecting strips, leakage of acoustic waves into the substrate via Bragg reflector, and the relative thicknesses of the electrodes and ferroelectric film. Compared with Al, the high acoustic impedance of Pt electrodes provides higher Q-factor, coupling coefficient, and tunability. However, using Pt in the interconnecting strips results in reduction of the Q-factor.

Författare

Andrei Vorobiev

Chalmers, Mikroteknologi och nanovetenskap (MC2), Terahertz- och millimetervågsteknik

Spartak Gevorgian

Chalmers, Mikroteknologi och nanovetenskap (MC2), Terahertz- och millimetervågsteknik

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

0885-3010 (ISSN)

Vol. 61 5 840-848

Ämneskategorier

Kommunikationssystem

Infrastruktur

Nanotekniklaboratoriet

DOI

10.1109/TUFFC.2014.6805697