Ultrathin Anodic Aluminum Oxide Membranes for Production of Dense Sub-20 nm Nanoparticle Arrays
Artikel i vetenskaplig tidskrift, 2014

We present a systematic study of membrane structure (pore diameter and arrangement) in anodized aluminum oxide (AAO) layers obtained by anodization voltages 8-20 V in sulfuric and 15-40 V in oxalic acid electrolyte solutions. Anodization of bulk aluminum in sulfuric acid at 10 V potential was found to be optimal for production or ultrathin freestanding membranes with pore diameter in sub-20 nm range. The developed process with slow electrochemical reaction results in AAO membranes with thickness below 70 nm. The minimum required time for formation of continuous AAO membrane was determined and influence of electrolyte concentration on pore diameter in membrane after barrier layer removal analyzed. Finally, we demonstrate a method of membrane transfer onto a different surface and using it for masked deposition of dense nanoparticle arrays with diameters below 20 nm.

FABRICATION

POROUS ALUMINA

FILMS

Författare

U. Malinovskis

Latvijas Universitate

Raimonds Popļausks

Latvijas Universitate

I. Apsite

Latvijas Universitate

R. Meija

Latvijas Universitate

J. Prikulis

Latvijas Universitate

Floriana Lombardi

Chalmers, Mikroteknologi och nanovetenskap (MC2), Kvantkomponentfysik

D. Erts

Latvijas Universitate

Journal of Physical Chemistry C

1932-7447 (ISSN) 1932-7455 (eISSN)

Vol. 118 8685-8690

Ämneskategorier

Materialteknik

Materialkemi

DOI

10.1021/jp412689y