Component for electromagnetic waves and a method for manufacturing the same
Patentansökan, 2005

The present invention relates to a method for fabricating a cavity in substrate for a component for electromagnetic waves, the method comprising providing said cavity by removal of material from said substrate by removal of material by immersing the substrate in a liquid bath of a chemical etchant, so that resultant cavity has a top and a bottom side and sidewalls, and said cavity at one of said top and/or bottom sides exhibits an at least a four sided opening having an opening with at least two different adjacent angles. The invention also relates to the component for microwave applications.

Författare

Leif Bergstedt

Spartak Gevorgian

Chalmers, Mikroteknologi och nanovetenskap (MC2), Mikrovågselektronik

Marica Gustafsson

Telefonaktiebolaget LM Ericsson

US20050215020-A1

US20050215020-A1

Ämneskategorier

Elektroteknik och elektronik