Micro-electromechanical arrangement
Patent, 2002

The present invention refers to a variable capacitor comprising a first conductive layer, a second conductive layer and a semiconductor layer, the first and second layers being arranged to be displaced relative to each other under the influence of an electrostatically generated force. The semiconductor layer constitutes a voltage generator, which when exposed to a radiation produces a voltage for charging the first and second conductive layers and induces the electrostatically generated force


Arne Alping

Spartak Gevorgian

Institutionen för mikroelektronik och nanovetenskap

Telefonaktiebolaget LM Ericsson


6380600 (B1)


Elektroteknik och elektronik