Characterisation of terahertz integrated membrane circuits
Licentiatavhandling, 2015

In this thesis a novel measurement setup and thru-reflect-line (TRL) calibration kit for vector network analyser (VNA) measurements at 220 GHz to 325 GHz (WR-03) is presented. Measurements on passive membrane circuit devices under test (DUTs) show improvement in the S-parameters compared to a waveguide integrated membrane circuit setup in previous work, especially in reducing the ripples and increasing repeatability of the measurements. VNA measurements provide a challenge when measuring on waveguide integrated membrane circuit devices at terahertz frequencies. In this setup, phase uncertainty in the measurements, due to waveguide width tolerance, is reduced by shortening the access waveguides. Because both waveguide inputs are placed in the same flange, the access waveguides can be made much shorter. However, in order to accommodate different DUT and TRL line lengths, two bends were introduced in each waveguide, and the trade-off between sharper bends or longer access waveguides effect on uncertainty, investigated. By the use of an adapter block, which puts the VNA extender outputs in the same flange, phase uncertainty due to cable flex is eliminated by locking the VNA frequency extenders in position during the entire measurement.

waveguide width error



membrane circuit


measurement uncertainty

single-flange 2-port

220–325 GHz

cable flex




Kollektorn, MC2
Opponent: Associate Professor Christian Fager


Johanna Hanning


Chalmers, Mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik

Single Flange 2-port Design For THz Integrated Circuit S-parameter Characterization

38th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2013,; (2013)p. 1-2

Paper i proceeding

Single-Flange 2-Port TRL Calibration for Accurate THz S-Parameter Measurements of Waveguide Integrated Circuits

IEEE Transactions on Terahertz Science and Technology,; Vol. 4(2014)p. 582-587

Artikel i vetenskaplig tidskrift


Informations- och kommunikationsteknik


Elektroteknik och elektronik



Technical report MC2 - Department of Microtechnology and Nanoscience, Chalmers University of Technology: MC2-299

Kollektorn, MC2

Opponent: Associate Professor Christian Fager

Mer information