Buckled diamond-like carbon nanomechanical resonators
Artikel i vetenskaplig tidskrift, 2015

We have developed capacitively-transduced nanomechanical resonators using sp(2)-rich diamond-like carbon (DLC) thin films as conducting membranes. The electrically conducting DLC films were grown by physical vapor deposition at a temperature of 500 degrees C. Characterizing the resonant response, we find a larger than expected frequency tuning that we attribute to the membrane being buckled upwards, away from the bottom electrode. The possibility of using buckled resonators to increase frequency tuning can be of advantage in rf applications such as tunable GHz filters and voltage-controlled oscillators.

Författare

M. Tomi

Aalto-Yliopisto

Andreas Isacsson

Chalmers, Teknisk fysik, Kondenserade materiens teori

M. Oksanen

Aalto-Yliopisto

D. Lyashenko

Aalto-Yliopisto

J. P. Kaikkonen

Aalto-Yliopisto

S. Tervakangas

J. Kolehmainen

P Hakonen

Aalto-Yliopisto

Nanoscale

2040-3364 (ISSN)

Vol. 7 14747-14751

Ämneskategorier

Materialteknik

Annan teknik

Styrkeområden

Materialvetenskap

DOI

10.1039/c5nr02820e