A miniaturized optical gas-composition sensor with integrated sample chamber
Artikel i vetenskaplig tidskrift, 2016

A robust and highly miniaturized optical gas sensor based on optical absorption spectroscopy is presented. By using the resonator cavity of a linear variable optical filter (LVOF) also as a gas chamber, a compact and robust optical sensor is achieved. The device operates at the 15th order in 3.2–3.4 μm wavelength range for distinguishing hydrocarbons. The physical cavity length at the μm-level is translated into an effective optical absorption path length at the mm-level by the use of highly reflective (R > 98%) Bragg mirrors. The optical design using the Fizeau interferometer approach is described. Moreover, the CMOS-compatible fabrication method is explained. In addition to the wideband and single wavelength filter characterization, absorption of methane in the LVOF cavity is demonstrated at 3392 nm and 3416.60 nm wavelengths.

Fabry-Perot interferometer

Fizeau interferometer

Mid-IR

Linear variable optical filter

Methane

Gas sensor

Författare

N.P. Ayerden

Technische Universiteit Delft

M. Ghaderi

Technische Universiteit Delft

Peter Enoksson

Elektronikmaterial och system

Ger de Graaf

Technische Universiteit Delft

Reinoud F. Wolffenbuttel

Technische Universiteit Delft

Sensors and Actuators, B: Chemical

0925-4005 (ISSN)

Vol. 236 29 917-925

Styrkeområden

Nanovetenskap och nanoteknik

Transport

Energi

Ämneskategorier

Annan teknik

Elektroteknik och elektronik

Infrastruktur

Nanotekniklaboratoriet

DOI

10.1016/j.snb.2016.03.081