XPS Study of Multilayer Multicomponent Films
Artikel i vetenskaplig tidskrift, 2018

In the paper, we propose an XPS-based quantitative method for depth profile analysis of chemical and phase composition of multi-component and multi-layer samples. The method includes: (1) new method for background subtraction accounting for depth non-uniformity of electron energy losses; (2) new method for photoelectron line decomposition into elementary peaks, which accounts for physical nature of the decomposition parameters; (3) joint solving of both background subtraction and photoelectron line decomposition problems; (4) criterion for assessing of line decomposition accuracy; (5) simple formula for layer thickness extraction for multi-element and multi-layer sample. We apply the developed method for analysis of multilayer niobium oxide and sub-oxide films before and in course of ion milling.

XPS background subtracting

XPS

Chemical and phase analysis

XPS line decomposition

Depth profiling

Niobium oxide

Författare

Alexander Lubenchenko

National Research University Moscow Power Engineering Institute

Alexander Batrakov

National Research University Moscow Power Engineering Institute

Alexey Pavolotskiy

Chalmers, Rymd-, geo- och miljövetenskap, Avancerad mottagarutveckling

Olga Lubenchenko

National Research University Moscow Power Engineering Institute

Dmitriy Ivanov

National Research University Moscow Power Engineering Institute

Applied Surface Science

0169-4332 (ISSN)

Vol. 427 711-721

Ämneskategorier

Annan materialteknik

Nanoteknik

Den kondenserade materiens fysik

DOI

10.1016/j.apsusc.2017.07.256