An easy-to-implement method for evaluation of capacitive resonant sensors
Artikel i vetenskaplig tidskrift, 2006

A novel method that can be used to characterize resonant capacitive sensors is presented. The method is based on measurement of the third harmonic of the current through the capacitor; thus the detection signal is frequency separated from the excitation signal. The measurement is time-continuousand only requires a very simple resonant structure where a single electrode is simultaneously used for excitation and detection. The readout circuit is easily implemented with a single operational amplifier and standard equipment such as a lock-in amplifier or a function generator and a spectrum analyzer. Measurements of a resonant structure confirm the feasibility of the concept.

Författare

Farzan Alavian Ghavanini

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fasta tillståndets elektronik

H. Rödjegård

Imego AB - The Institute of Micro and Nanotechnology

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fasta tillståndets elektronik

Journal of Micromechanics and Microengineering

0960-1317 (ISSN)

Vol. 16 s156-s160

Ämneskategorier

Övrig annan teknik

DOI

10.1088/0960-1317/16/6/S23