High-Temperature Electronic Materials: Silicon Carbide and Diamond
Kapitel i bok, 2007

The physical and chemical properties of wide-band-gap semiconductors make these materials an ideal wide bandgapsemiconductor choice for device fabrication for applications in many different areas, e.g. light emitters, high-temperature and high-power electronics, high-power microwave devices, micro-electromechanical system (MEM) technology, and substrates for semiconductor preparation. These semiconductors have micro-electromechanical system (MEMS) been recognized for several decades as being suitable for these applications, but until recently the low material quality has not allowed the fabrication of high-quality devices. In this material quality chapter, we review the wide-band-gap semiconductors, silicon carbide and diamond. Silicon carbide electronics is advancing from the research stage to commercial production. The commercial availability of single-crystal SiC substrates during the early 1990s gave rise to intense activity in the development of silicon carbide devices. The commercialization started with the release of blue light-emitting diode (LED). The recent release of high-power Schottky diodes was a further demonstration of the progress made towards defect-free SiC substrates. Diamond has superior physical and chemical properties. Silicon-carbide- and diamond-based diamondsilicon carbide (SiC) electronics are at different stages of development. The preparation of high-quality single-crystal substrates of wafer size has allowed recent significant progress in the fabrication of several types of devices, and the development has reached many important milestones. However, high-temperature studies are still scarce, and diamond-based electronics is still in its infancy.

Schottky Barrier Diode

Silicon Carbide

Diamond Film

Chemical Vapor Deposition Technique

Chemical Vapor Deposition Diamond


Magnus Willander

Göteborgs universitet

Milan Friesel

Chalmers, Fysik

Q.-U. Wahab

Linköpings universitet

B. Straumal

Russian Academy of Sciences

Springer Handbooks



Textil-, gummi- och polymermaterial

Annan elektroteknik och elektronik

Den kondenserade materiens fysik



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