Laser-assisted micro-grinding of Si3N4
Artikel i vetenskaplig tidskrift, 2019

One of the main challenges in micro-machining of hard to cut materials is the accuracy of the machined part because of high grinding forces which cause tool deflection and rapid tool wear. Non-conventional machining processes have been developed as alternatives to conventional processes for optimizing the machining efficiency and achieving the desired tolerances. This paper addresses a novel Laser-Assisted Micro-Grinding (LAMG) process. For the first time, an ultra-short pulse laser is used to structure micro-grinding tools and a Si3N4 workpiece prior to the micro-grinding. The induced grinding forces and achieved surface roughness as well as the tool deflection and wear by the LAMG process are compared to the Conventional Micro-Grinding (CMG) process. Additionally, the ultra-short pulsed laser ablation process was simulated to find the proper laser parameters corresponding to the desired structure and laser-cut depth. The results proved an enhanced performance of LAMG process in micro-grinding of Si3N4. Using the simulation, the depth of laser cut prior to structuring could be predicted. Structuring, either the workpiece or the tool, significantly reduced the grinding forces. However, a rougher surface resulted via tool structuring. The grinding forces reduced up to almost 40% using 30% structured workpiece surfaces. Structuring the micro-tool (10% structuring) resulted in 60% reduction in the grinding forces with around 40% rougher surface. The accuracy of the part was highly improved by the laser structuring. The actual depth of cut using CMG was 30% lower than the nominal depth of cut. Utilizing LAMG the total nominal depth of cut was removed from material. The comparison between the topography of structured and non-structured tools indicated higher tool wear and shorter tool life with the non-structured tool.

Laser structuring

Tool deflection


Surface roughness

Laser-assisted micro-grinding

Silicon nitride

Cutting forces


Mohammadali Kadivar

Hochschule Furtwangen (HFU)

Sergey Shamray

Hochschule Furtwangen (HFU)

Soheil Soltani

Hochschule Furtwangen (HFU)

Amir Daneshi

Hochschule Furtwangen (HFU)

Bahman Azarhoushang

Hochschule Furtwangen (HFU)

Precision Engineering

0141-6359 (ISSN)

Vol. 60 394-404


Produktionsteknik, arbetsvetenskap och ergonomi



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