Laser ablation lithography on thermoelectric semiconductor
Artikel i vetenskaplig tidskrift, 2006

In this paper, experimental results of the investigation of the periodic structure on thermoelectric semiconductor Cu2Se are presented. Periodic structures were formed on surfaces of semiconductors due to multi-beam interaction of Q-switched Nd:YAG laser, which was operated in the lowest order of Gaussian mode and pulse duration 7ns. Surface temperature evolution and transient reflectivity are studied during laser treatment. Creation of Cu islands in the maximal intensity of interference pattern was found.

Författare

O. Y. Semchuk

V.N. Semioshko

L.G. Grechko

Magnus Willander

Göteborgs universitet

Magnus Karlsteen

Göteborgs universitet

Applied Surface Science

0169-4332 (ISSN)

Vol. 252 4759-4762

Ämneskategorier

Fysik

DOI

10.1016/j.apsusc.2005.07.112