Field emission from multiwalled carbon nanotubes – its application in NEMS

Artikel i vetenskaplig tidskrift, 2005

Nanoelectromechanical systems (NEMS) are a rapidly growing area of research. We discuss here the fabrication of two different three terminal nanorelay structures based on multi-walled carbon nanotubes (MWNT). Using a gate voltage the whole MWNT can be deflected and the tip of the carbon nanotube can be moved closer to a drain electrode making physical contact. In another device structure the carbon nanotubes are shorter so they never can get real physical contact with the drain electrode, instead this device is based on the process of electron field emission from the MWNT.