Air-Oxidation of Nb Nano-Films
Artikel i vetenskaplig tidskrift, 2018
X-ray photoelectron spectroscopy (XPS) depth chemical and phase profiling of air-oxidized niobium nanofilms has been performed. It is found that oxide layer thicknesses depend on the initial thickness of the niobium nanofilm. The increase in thickness of the initial Nb nano-layer is due to increase in thickness of an oxidized layer.
Författare
A. Lubenschenko
National Research University Moscow Power Engineering Institute
A Batrakov
National Research University Moscow Power Engineering Institute
Dmitriy Ivanov
National Research University Moscow Power Engineering Institute
Olga Lubenchenko
National Research University Moscow Power Engineering Institute
I. A. Lashkov
National Research University Moscow Power Engineering Institute
Alexey Pavolotskiy
Chalmers, Rymd-, geo- och miljövetenskap, Onsala rymdobservatorium
B. Schleicher
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden
N. Albert
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden
K. Nielsch
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden
Semiconductors
1063-7826 (ISSN) 1090-6479 (eISSN)
Vol. 52 5 678-682Ämneskategorier
Oorganisk kemi
Materialkemi
Annan kemiteknik
DOI
10.1134/S1063782618050196