Mid-infrared microspectrometers based on an array of differently tuned integrated metamaterial absorbers
Paper i proceeding, 2018
Integration of an array of differently tuned mid-infrared metamaterial-based absorbers on top of thermopile detector arrays in a compatible fabrication process is presented. UV lithography is used for patterning over large areas with high throughput.
metamaterials
Fabrication process
matematerial absorbers
Detector arrays
optical materials
Författare
Mohammadamir Ghaderi
TU Delft
Ehsan Karimi Shahmarvandi
TU Delft
Reinoud F. Wolffenbuttel
TU Delft
Optics InfoBase Conference Papers
21622701 (eISSN)
978-155752820-9 (ISBN)
Novel Optical Materials and Applications, NOMA 2018
Zurich, Switzerland,
Zurich, Switzerland,
Ämneskategorier
Atom- och molekylfysik och optik
DOI
10.1364/NOMA.2018.NoW1D.3