A new, sensitive diffractive optic angle meter
Paper i proceeding, 2002
A sensitive diffractive optic angle meter scheme, based on coherent imaging of two laterally shifted phase gratings onto a third, their periods matched, is presented and experimentally investigated. An angle less than 0.5 µrad was readily measured.
Författare
Anders Magnusson
Institutionen för mikroelektronik
Kamyar Kazemi Moud
Institutionen för mikroelektronik
Sverker Hård
Institutionen för mikroelektronik
Diffractive Optics and Micro-Optics
paper DTuB2
Diffractive Optics and Micro-Optics 2002
Tucson, USA,
Tucson, USA,
Ämneskategorier
Elektroteknik och elektronik
DOI
10.1364/DOMO.2002.DTuB2