Interferometric sensor based on coherent imaging of gratings
Artikel i vetenskaplig tidskrift, 2003

A sensitive interferometric sensor scheme that is based on coherent imaging of a first phase grating onto a second phase grating, their periods accurately matched, is suggested. Experimental data, obtained with a setup based on the suggested scheme, are presented. The sensor was found capable of measuring an angular tilt of a mirror less than 0.5 μrad. Compared with a previously suggested measuring scheme, the novelty of the one presented here is the inclusion of a second set of gratings, which eliminates measurement ambiguity. Some characteristics of the sensor scheme are discussed.

Fresnel diffraction

Gratings

Talbot effect

Författare

Anders Magnusson

Institutionen för mikroelektronik

Kamyar Kazemi Moud

Institutionen för mikroelektronik

Sverker Hård

Institutionen för mikroelektronik

Applied Optics

1559-128X (ISSN) 2155-3165 (eISSN)

Vol. 42 1 67-70

Ämneskategorier

Telekommunikation

Atom- och molekylfysik och optik

Annan fysik

DOI

10.1364/AO.42.000067

Mer information

Skapat

2021-01-07