SU-8 free-standing microfluidic probes
Artikel i vetenskaplig tidskrift, 2017

We present a process for fabrication of free-standing SU-8 probes, with a dry, mechanical release of the final micro-devices. The process utilizes the thermal release tape, a commonly used cleanroom material, for facile heat-release from the sacrificial layer. For characterization of the SU-8 microfluidic probes, two liquid interfaces were designed: a disposable interface with integrated wells and an interface with external liquid reservoirs. The versatility of the fabrication and the release procedures was illustrated by further developing the process to functionalize the SU-8 probes for impedance sensing, by integrating metal thin-film electrodes. An additional interface scheme which contains electronic components for impedance measurements was developed. We investigated the possibilities of introducing perforations in the SU-8 device by photolithography, for solution sampling predominantly by diffusion. The SU-8 processes described here allow for a convenient batch production of versatile free-standing microfluidic devices with well-defined tip-geometry. (C) 2017 Author(s).

technology

cell analysis

high-throughput

Biochemistry & Molecular Biology

devices

multifunctional pipette

sensor

single cells

microstructures

surfaces

Biophysics

fabrication

Författare

Anna Kim

Kemi och kemiteknik, Kemi och biokemi, Fysikalisk kemi

Kiryl Kustanovich

Kemi och kemiteknik, Kemi och biokemi, Fysikalisk kemi

D. Baratian

MESA Institute for Nanotechnology

Chalmers University of Technology

Alar Ainla

Kemi och kemiteknik, Kemi och biokemi, Fysikalisk kemi

Mehrnaz Shaali

Kemi och kemiteknik, Kemi och biokemi, Fysikalisk kemi

Gavin Jeffries

Kemi och kemiteknik, Kemi och biokemi, Fysikalisk kemi

Aldo Jesorka

Kemi och kemiteknik, Kemi och biokemi, Fysikalisk kemi

Biomicrofluidics

1932-1058 (ISSN)

Vol. 11 014112

Ämneskategorier

Textil-, gummi- och polymermaterial

Materialkemi

Styrkeområden

Materialvetenskap

DOI

10.1063/1.4975026