The effect of longitudinal substrate currents on the losses in silicon substrate coplanar-strip and coplanar waveguides
Artikel i vetenskaplig tidskrift, 2000
The strip currents in silicon substrate CPS and CPW induce longitudinal currents in the substrate (along the strips of the lines) causing extra microwave losses. It is shown that these losses may be minimized without introducing extra masks and process steps if the slot widths in the lines are chosen properly
losses
silicon
transmission lines
Författare
Håkan Berg
Spartak Gevorgian
Institutionen för mikroelektronik och nanovetenskap
International Journal of RF and Microwave Computer-Aided Engineering
1096-4290 (ISSN) 1099-047X (eISSN)
Vol. 10 5 284-288Ämneskategorier
Elektroteknik och elektronik
Annan elektroteknik och elektronik
DOI
10.1002/1099-047X(200009)10:5<284::AID-MMCE3>3.0.CO;2-2