Towards sub-nanometer feature sizes by high-resolution electronbeam litography

Description missing.

Participants

Peter Modh (contact)

Avdelningschef vid Chalmers, Microtechnology and Nanoscience (MC2), Nanofabrication Laboratory

Funding

Knut and Alice Wallenberg Foundation

Funding Chalmers participation during 2013–2020

Related Areas of Advance and Infrastructure

Sustainable development

Driving Forces

Nanoscience and Nanotechnology

Areas of Advance

Nanofabrication Laboratory

Infrastructure

More information

Latest update

2015-12-16