Towards sub-nanometer feature sizes by high-resolution electronbeam litography

Description missing.

Participants

Peter Modh (contact)

Forskare at Microtechnology and Nanoscience, Nanofabrication Laboratory

Funding

Knut and Alice Wallenberg Foundation

Funding years 2013–2020

Related Areas of Advance and Infrastructure

Nanoscience & Nanotechnology

Area of Advance

Sustainable Development

Chalmers Driving Force

NFL/Myfab (Nanofabrication Laboratory)

Chalmers Research Infrastructure

More information

Latest update

2015-12-16