Towards sub-nanometer feature sizes by high-resolution electronbeam litography
Research Project , 2013 – 2020

Description missing.

Participants

Peter Modh (contact)

Head of Division at Chalmers, Microtechnology and Nanoscience (MC2), Nanofabrication Laboratory

Funding

Knut and Alice Wallenberg Foundation

Project ID: 2011-0227
Funding Chalmers participation during 2013–2020

Related Areas of Advance and Infrastructure

Sustainable development

Driving Forces

Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)

Areas of Advance

Nanofabrication Laboratory

Infrastructure

More information

Latest update

2015-12-16