Expanding in situ TEM instrumentation with MEMS technology

Paper in proceeding, 2009

Nanofactory Instruments is a spin off company from Chalmers University of Technology which offers instrumentation for nano-scale electrical and mechanical characterization correlated with real time imaging in situ in transmission electron microscopes (TEM). As a core component in the company’s product portfolio, proprietary MEMS sensors for quantitative force measurements on the nano-Newton and micro-Newton scales were developed. As a result of the introduction of MEMS technology into the products, added value was created and the company has now established a leading position in the market.