Expanding in situ TEM instrumentation with MEMS technology
Paper i proceeding, 2009

Nanofactory Instruments is a spin off company from Chalmers University of Technology which offers instrumentation for nano-scale electrical and mechanical characterization correlated with real time imaging in situ in transmission electron microscopes (TEM). As a core component in the company’s product portfolio, proprietary MEMS sensors for quantitative force measurements on the nano-Newton and micro-Newton scales were developed. As a result of the introduction of MEMS technology into the products, added value was created and the company has now established a leading position in the market.


In situ TEM


Commersialization of micro and nano systems (COMS) 2009



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