Simple self-aligned fabrication process for silicon carbide static induction transistors
Journal article, 2004
Author
Kristina Dynefors
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Vincent Desmaris
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Joakim Eriksson
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Niklas Rorsman
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Herbert Zirath
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Materials Science Forum
Vol. 457-460 1125-
Subject Categories
Manufacturing, Surface and Joining Technology
Other Electrical Engineering, Electronic Engineering, Information Engineering