Simple self-aligned fabrication process for silicon carbide static induction transistors
Journal article, 2004

Author

Kristina Dynefors

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Vincent Desmaris

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Joakim Eriksson

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Niklas Rorsman

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Herbert Zirath

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Materials Science Forum

Vol. 457-460 1125-

Subject Categories

Manufacturing, Surface and Joining Technology

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/7/2017