Planar double-gate SOI MOS devices: Fabrication by wafer bonding over pre-patterned cavities and electrical characterization
Journal article, 2007
Author
T.M Chung
B Olbrechts
Ulf Södervall
Chalmers, Microtechnology and Nanoscience (MC2)
Stefan Bengtsson
Chalmers, Microtechnology and Nanoscience (MC2)
D Flandre
J. P. Raskin
Solid State Electronics
Vol. 51 2 231-238
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering