The microstructure of CVD κ-Al2O3 multilayers separated by thin intermediate TiN or TiC layers

Mats Halvarsson; Jessika Trancik; Sakari Ruppi

The microstructure of CVD κ-Al2O3 multilayers separated by thin intermediate TiN or TiC layers
Journal article, 2006

Author

Mats Halvarsson

Chalmers, Applied Physics, Microscopy and Microanalysis

Other publications Research

Jessika Trancik

Sakari Ruppi

International Journal of Refractory Metals & Hard Materials

Vol. 24 32-38

Subject Categories

Materials Engineering

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Created

10/7/2017

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The microstructure of CVD κ-Al2O3 multilayers separated by thin intermediate TiN or TiC layers Journal article, 2006