A micromachined Nanoindentation force sensor
Paper in proceeding, 2004
microfabrication
force sensor
nanoindentation
Author
Alexandra Nafari
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Håkan Olin
Andrey Danilov
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Eurosensors
Vol. XVIII 62-63
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering