A micromachined nanoindentation force sensor
Journal article, 2005

transmission electron microscope

microfabrication

interchangable tip

Force sensor

Nanoindentation

Capacitive detection

Author

Alexandra Nafari

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Andrey Danilov

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Henrik Rödjegård

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Håkan Olin

Sensors and Actuators, A: Physical

0924-4247 (ISSN)

Vol. A123-124 23 44-49

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/7/2017