Silicon substrate integrated high Q-factor parallel-plate ferroelectric varactors
Journal article, 2003
Author
Andrei Vorobiev
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Pär Rundqvist
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Khaled Khamchane
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Appl. Phys. Lett.
Vol. 83 3144-
Subject Categories
Other Materials Engineering