SrTiO3 thin film varactors on Si for microwave applications
Journal article, 2002
Author
Andrei Vorobiev
Department of Microelectronics and Nanoscience
Pär Rundqvist
Department of Microelectronics and Nanoscience
Khaled Khamchane
Department of Microelectronics and Nanoscience
Spartak Gevorgian
Department of Microelectronics and Nanoscience
Fall 2002 MRS Symposium Proceedings, Boston, USA
Subject Categories
Other Materials Engineering