Fabrication of nanoscale electrostatic lenses
Journal article, 2010

The fabrication of cylindrical multi-element electrostatic lenses at the nanoscale presents a challenge; they are high-aspect-ratio structures that should be rotationally symmetric, well aligned and freestanding, with smooth edges and flat, clean surfaces. In this paper, we present the fabrication results of a non-conventional process, which uses a combination of focused gallium ion-beam milling and hydrofluoric acid vapor etching. This process makes it possible to fabricate nanoscale electrostatic lenses down to 140 nm in aperture diameter and 4.2 mu m in column length, with a superior control of the geometry as compared to conventional lithography-based techniques.

field

objective lens

microscope

systems

Author

Ihab Sinno

Chalmers, Microtechnology and Nanoscience (MC2)

Anke Sanz-Velasco

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

S. Kang

C2V

H. Jansen

MESA Institute for Nanotechnology

Eva Olsson

Chalmers, Applied Physics, Microscopy and Microanalysis

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Krister Svensson

Karlstad University

Journal of Micromechanics and Microengineering

0960-1317 (ISSN)

Vol. 20 9

Areas of Advance

Transport

Production

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1088/0960-1317/20/9/095031

More information

Latest update

5/23/2018