Fabrication of nanoscale electrostatic lenses
Artikel i vetenskaplig tidskrift, 2010

The fabrication of cylindrical multi-element electrostatic lenses at the nanoscale presents a challenge; they are high-aspect-ratio structures that should be rotationally symmetric, well aligned and freestanding, with smooth edges and flat, clean surfaces. In this paper, we present the fabrication results of a non-conventional process, which uses a combination of focused gallium ion-beam milling and hydrofluoric acid vapor etching. This process makes it possible to fabricate nanoscale electrostatic lenses down to 140 nm in aperture diameter and 4.2 mu m in column length, with a superior control of the geometry as compared to conventional lithography-based techniques.

field

objective lens

microscope

systems

Författare

Ihab Sinno

Chalmers, Mikroteknologi och nanovetenskap (MC2)

Anke Sanz-Velasco

Chalmers, Teknisk fysik, Elektronikmaterial och system

S. Kang

C2V

H. Jansen

MESA Institute for Nanotechnology

Eva Olsson

Chalmers, Teknisk fysik, Mikroskopi och mikroanalys

Peter Enoksson

Chalmers, Teknisk fysik, Elektronikmaterial och system

Krister Svensson

Karlstads universitet

Journal of Micromechanics and Microengineering

0960-1317 (ISSN)

Vol. 20 9

Styrkeområden

Transport

Produktion

Ämneskategorier

Elektroteknik och elektronik

DOI

10.1088/0960-1317/20/9/095031

Mer information

Senast uppdaterat

2018-05-23