Interface study of AlN grown on Si substrates by radio frequency magnetron reactive sputtering
Journal article, 2005

Author

Thorvald Andersson

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Other publications Research

Thin Solid Films

Vol. 471 336-

Subject Categories

Other Engineering and Technologies not elsewhere specified

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Created

10/6/2017

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