Fabrication and characterization of IC-Compatible Linear Variable Optical Filters with application in a micro-spectrometer
Journal article, 2010

This paper reports on an IC-Compatible process for the fabrication of Linear Variable Optical Filter (LVOF). The LVOF is integrated with a detector array to result in a micro-spectrometer. The technological challenge in fabrication of an LVOF is fabrication of a well-controlled tapered cavity layer. Very small taper angles, ranging from 0.001 degrees to 0.1 degrees. are fabricated in a resist layer by just one lithography step and a subsequent reflow process. The 3D pattern of resist structures is subsequently transferred into SiO2 by an appropriate etching. Complete LVOF fabrication involves CMOS-compatible deposition of a lower dielectric mirror using a stack of dielectrics on the wafer, tapered layer formation and the deposition of the top dielectric mirror. The design principle, IC-Compatible processing and the characterization results on fabricated LVOFs are presented. (C) 2010 Elsevier B.V. All rights reserved.

Tapered layer

Optical filter

Thin film

Linear variable filter

Micro-spectrometer

Reflow

Author

A. Emadi

Delft University of Technology

H. Wu

Delft University of Technology

S. Grabarnik

Delft University of Technology

G. De Graaf

Delft University of Technology

Karin Hedsten

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

J. H. Correia

University of Minho

R. F. Wolffenbuttel

Delft University of Technology

Sensors and Actuators, A: Physical

0924-4247 (ISSN)

Vol. 162 2; Sp. Iss. SI 400-405

Areas of Advance

Transport

Production

Subject Categories

Physical Sciences

DOI

10.1016/j.sna.2010.04.029

More information

Latest update

5/14/2018