Fabrication and characterization of IC-Compatible Linear Variable Optical Filters with application in a micro-spectrometer
Artikel i vetenskaplig tidskrift, 2010

This paper reports on an IC-Compatible process for the fabrication of Linear Variable Optical Filter (LVOF). The LVOF is integrated with a detector array to result in a micro-spectrometer. The technological challenge in fabrication of an LVOF is fabrication of a well-controlled tapered cavity layer. Very small taper angles, ranging from 0.001 degrees to 0.1 degrees. are fabricated in a resist layer by just one lithography step and a subsequent reflow process. The 3D pattern of resist structures is subsequently transferred into SiO2 by an appropriate etching. Complete LVOF fabrication involves CMOS-compatible deposition of a lower dielectric mirror using a stack of dielectrics on the wafer, tapered layer formation and the deposition of the top dielectric mirror. The design principle, IC-Compatible processing and the characterization results on fabricated LVOFs are presented. (C) 2010 Elsevier B.V. All rights reserved.



Tapered layer

Optical filter

Thin film

Linear variable filter


A. Emadi

Delft University of Technology

H. Wu

Delft University of Technology

S. Grabarnik

Delft University of Technology

G. De Graaf

Delft University of Technology

Karin Hedsten

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

J. H. Correia

Universidade do Minho

R. F. Wolffenbuttel

Delft University of Technology

Sensors and Actuators, A: Physical

0924-4247 (ISSN)

Vol. 162 400-405