Karin Hedsten
Visar 25 publikationer
Spectral measurement using IC-compatible linear variable optical filter
An UV linear variable optical filter-based micro-spectrometer
Spectral measurement using IC-compatible linear variable optical filter
Mechanically Coupled Comb Drive MEMS Stages
Micro- and Nanosystems for Sensing in Medicine
MEMS-based VCSEL beam steering using replicated polymer diffractive lens
Hot Embossed Microoptics in Silicon Micromachining using a Substrate Bonder
Downscaling Optical Biosensing System
MEMS-based VCSEL beam steering using replicated polymer diffractive lens
Downscaling optical biosensing system
Refractive lenses in silicon micromachining by reflow of amorphous fluorocarbon polymer
Replication of continuous-profiled micro-optical elements for silicon integration
2D laser beamsteering by integration of MEMS and diffractive optics
Sensors and actuators based on SOI materials
Supporting structures for transmissive optical components in MEMS
2D VCSEL beam steering using MEMS and replicated diffractive micro-optics
Refractive Lenses in Silicon Micromachining by Reflow of Amorphous Fluorocarbon Polymer
Microreplication in a silicon processing compatible polymer material
Microreplication in a Silicon Processing Compatible Material
A novel technique for integration of optical elements onto silicon
Replicated diffractive optical element in silicon micromachining
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