Mechanically Coupled Comb Drive MEMS Stages
Paper i proceeding, 2008
An electrostatic large clear-aperture in-plane scanner with a novel actuation principle Is presented for fast and large stroke scanning applications. 9 μm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
electrostatic actuation
Mechanical coupling
MEMS stage
Författare
Aslihan Arslan
Koç Üniversitesi
Caglar Ataman
Koç Üniversitesi
Sven Holmström
Koç Üniversitesi
Karin Hedsten
Chalmers, Teknisk fysik, Elektronikmaterial
H. Rahmi Seren
Koç Üniversitesi
Hakan Urey
Koç Üniversitesi
Peter Enoksson
Chalmers, Teknisk fysik, Elektronikmaterial
2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS; Freiburg; Germany; 11 August 2008 through 14 August 2008
140-141
978-142441918-0 (ISBN)
Ämneskategorier
Telekommunikation
DOI
10.1109/OMEMS.2008.4607868
ISBN
978-142441918-0