Mechanically Coupled Comb Drive MEMS Stages
Paper i proceeding, 2008

An electrostatic large clear-aperture in-plane scanner with a novel actuation principle Is presented for fast and large stroke scanning applications. 9 μm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.

electrostatic actuation

Mechanical coupling

MEMS stage

Författare

Aslihan Arslan

Koç Üniversitesi

Caglar Ataman

Koç Üniversitesi

Sven Holmström

Koç Üniversitesi

Karin Hedsten

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

H. Rahmi Seren

Koç Üniversitesi

Hakan Urey

Koç Üniversitesi

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS; Freiburg; Germany; 11 August 2008 through 14 August 2008

140-141

Ämneskategorier

Telekommunikation

DOI

10.1109/OMEMS.2008.4607868

ISBN

978-142441918-0