Mechanically Coupled Comb Drive MEMS Stages
Paper in proceeding, 2008
An electrostatic large clear-aperture in-plane scanner with a novel actuation principle Is presented for fast and large stroke scanning applications. 9 μm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
electrostatic actuation
Mechanical coupling
MEMS stage
Author
Aslihan Arslan
Koç University
Caglar Ataman
Koç University
Sven Holmström
Koç University
Karin Hedsten
Chalmers, Applied Physics, Electronics Material and Systems
H. Rahmi Seren
Koç University
Hakan Urey
Koç University
Peter Enoksson
Chalmers, Applied Physics, Electronics Material and Systems
2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS; Freiburg; Germany; 11 August 2008 through 14 August 2008
140-141
978-142441918-0 (ISBN)
Subject Categories
Telecommunications
DOI
10.1109/OMEMS.2008.4607868
ISBN
978-142441918-0