Spectral measurement using IC-compatible linear variable optical filter
Paper i proceeding, 2010

This paper reports on the functional and spectral characterization of a microspectrometer based on a CMOS detector array covered by an IC-Compatible Linear Variable Optical Filter (LVOF). The Fabry-Perot LVOF is composed of 15 dielectric layers with a tapered middle cavity layer, which has been fabricated in an IC-Compatible process using resist reflow. A pattern of trenches is made in a resist layer by lithography and followed by a reflow step result in a smooth tapered resist layer. The lithography mask with the required pattern is designed by a simple geometrical model and FEM simulation of reflow process. The topography of the tapered resist layer is transferred into silicon dioxide layer by an optimized RIE process. The IC-compatible fabrication technique of such a LVOF, makes fabrication directly on a CMOS or CCD detector possible and would allow for high volume production of chip-size micro-spectrometers. The LVOF is designed to cover the 580 nm to 720 spectral range. The dimensions of the fabricated LVOF are 5×5 mm2. The LVOF is placed in front of detector chip of a commercial camera to enable characterization. An initial calibration is performed by projecting monochromatic light in the wavelength range of 580 nm to 720 nm on the LVOF and the camera. The wavelength of the monochromatic light is swept in 1 nm steps. The Illuminated stripe region on the camera detector moves as the wavelength is swept. Afterwards, a Neon lamp is used to validate the possibility of spectral measurement. The light from a Neon lamp is collimated and projected on the LVOF on the camera chip. After data acquisition a special algorithm is used to extract the spectrum of the Neon lamp.

Linear Variable Filter


CMOS-compatible optical sensors

tapered Fabry-Perot


Arvin Emadi

Semen Grabarnik

Huaiwen Wu

Ger de Graaf

Karin Hedsten

Chalmers, Mikroteknologi och nanovetenskap, Nanotekniklaboratoriet

Peter Enoksson

Chalmers, Teknisk fysik, Elektronikmaterial

Jose Higino Correia

Reinoud F. Wolffenbuttel

Proc. of SPIE

Vol. 7716


Nanovetenskap och nanoteknik (SO 2010-2017, EI 2018-)





Elektroteknik och elektronik



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