An UV linear variable optical filter-based micro-spectrometer
Paper i proceeding, 2010

This paper presents the design, fabrication and spectral measurements of an Ultra-Violet (UV) Linear Variable Optical Filter (LVOF)-based micro-spectrometer operating in the 300 nm - 400 nm wavelength range. The UV LVOF has been fabricated in an IC-Compatible process using resist reflow. Characterization by passing monochromatic light through the LVOF, shows high linearity of the profile. It is expected that using signal processing, spectral resolution better than 0.5 nm can be achieved with this UV LVOF. The filter provides the possibility to have a robust high-resolution micro-spectrometer in the UV on a CMOS chip.

Linear variable filter

On-chip

Micro-spectrometer

UV

Ultra-Violet

Författare

A. Emadi

Technische Universiteit Delft

H. Wu

Technische Universiteit Delft

G. De Graaf

Technische Universiteit Delft

Karin Hedsten

Chalmers, Mikroteknologi och nanovetenskap (MC2), Nanotekniklaboratoriet

Peter Enoksson

Chalmers, Teknisk fysik, Elektronikmaterial och system

J. H. Correia

Universidade do Minho

R. F. Wolffenbuttel

Technische Universiteit Delft

Procedia Engineering, Proc. Eurosensors XXIV, September 5-8, 2010, Linz, Austria

1877-7058 (eISSN)

Vol. 5 416-419

Styrkeområden

Transport

Produktion

Ämneskategorier

Fysik

Elektroteknik och elektronik

DOI

10.1016/j.proeng.2010.09.135

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Senast uppdaterat

2018-05-14