Widely tunable high-speed bulk-micromachined short-wavelength MEMS-VCSEL
Paper in proceedings, 2010

We present the first results of a high-speed bulk-micromachined tunable vertical-cavity surface-emitting laser (VCSEL) operating near 850nm using a half-symmetric resonator with a movable curved microelectromechanical system (MEMS) membrane.

Author

Hooman A. Davani

Technische Universität Darmstadt

Christian Grasse

Walter Schottky Institute

Benjamin Kögel

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Petter Westbergh

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Christian Gierl

Technische Universität Darmstadt

Karolina Zogal

Technische Universität Darmstadt

Sandro Jatta

Technische Universität Darmstadt

Gerhard Böhm

Walter Schottky Institute

Tobias Gründl

Walter Schottky Institute

Peter Meissner

Technische Universität Darmstadt

Anders Larsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

M. C. Amann

Walter Schottky Institute

Semiconductor Laser Conference (ISLC), 2010 22nd IEEE International

0899-9406 (ISSN)

9-10

Subject Categories

Telecommunications

DOI

10.1109/ISLC.2010.5642777

ISBN

978-1-4244-5683-3

More information

Latest update

2/28/2018