An electrowetting-based microfluidic platform for magnetic bioassays
Paper in proceedings, 2010

Here we present our recent work on a droplet-based microfluidic device for manipulating microliter-sized droplets. By replacing the formerly used common dielectric SiO2 with Si3N4 and applying a 33 nm thick Teflon top layer to create a hydrophobic surface, we successfully lowered the actuation voltage from 450 V to 50 Vdc/40 Vac. Sputtered HfO2 with high dielectric constant was also investigated as an insulator, which could reproducibly yield thin defect-free insulation layers and lower the actuation voltage to less than 40 V.

High-k dielectric

Hafnium dioxide (HfO2)

ElectroWetting-On-Dielectric (EWOD)

Silicon nitride (Si3N4)

Superconducting Quantum Interference Device (SQUID)

Digital microfluidics

Author

S Chang

Chalmers, Microtechnology and Nanoscience (MC2)

Vincent Schaller

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Bahman Raeissi

Chalmers, Applied Physics, Physical Electronics

Alexei Kalaboukhov

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Justin Schneiderman

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Fredrik Öisjöen

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Aldo Jesorka

Chalmers, Chemical and Biological Engineering, Physical Chemistry

Andrea Prieto Astalan

Imego AB - The Institute of Micro and Nanotechnology

Christer Johansson

Imego AB - The Institute of Micro and Nanotechnology

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Dag Winkler

Chalmers, Microtechnology and Nanoscience (MC2)

Anke Sanz-Velasco

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2010, 3-7 Oktober, Groningen, Neterlands

Vol. 2 1331-1333

Areas of Advance

Transport

Production

Subject Categories

Other Engineering and Technologies

Electrical Engineering, Electronic Engineering, Information Engineering

Microbiology in the medical area

ISBN

978-161839062-2

More information

Latest update

7/22/2019