Development of planar THz Schottky diodes

Paper in proceeding, 2011

We present the technological development of the air bridge planar Schottky diode process at Chalmers University of Technology for the use as submillimeter wave mixer and multiplier. Our first evaluation is targeted for the heterodyne receivers (i.e. atmosphere sounders) operation at 340 GHz. The aim is to develop a reliable and repeatable Schottky diode process, with good electrical and mechanical characteristics. In addition, the scalability of the diode geometry for diode integration in THz circuits is also taken into account in this development.