Development of planar THz Schottky diodes
Paper in proceedings, 2011

We present the technological development of the air bridge planar Schottky diode process at Chalmers University of Technology for the use as submillimeter wave mixer and multiplier. Our first evaluation is targeted for the heterodyne receivers (i.e. atmosphere sounders) operation at 340 GHz. The aim is to develop a reliable and repeatable Schottky diode process, with good electrical and mechanical characteristics. In addition, the scalability of the diode geometry for diode integration in THz circuits is also taken into account in this development.

Author

Vladimir Drakinskiy

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Peter Sobis

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Aik-Yean Tang

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Tomas Bryllert

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Jan Stake

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

6th ESA Workshop on Millimetre-Wave Technology and Applications

Areas of Advance

Information and Communication Technology

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

Infrastructure

Nanofabrication Laboratory

More information

Created

10/7/2017