Transfer-free fabrication of suspended graphene grown by chemical vapor deposition
Paper in proceedings, 2012

Graphene, a true two-dimensional material with extraordinary mechanical- and electronic properties, is thought to be ideal for nanoelectromechanical systems (NEMS), like mass- and force sensors. Here, we present two different ways to fabricate suspended graphene for the intended use in future NEMS applications. The fabrication schemes do not require transfer of graphene from a catalyst where the graphene is grown on to another supporting substrate. The transfer is a source of several issues causing irreproducibility in large-scale production of graphene devices. We obtain suspended graphene membranes by locally removing the copper thin film on top of which the graphene is catalytically grown. The membranes are uniform and exhibit mechanical properties similar to those of exfoliated graphene. Also, suspended graphene beams with electrical interconnects are fabricated from non-catalytically grown graphene on SiO 2. Both approaches represent the first steps towards transfer-free fabrication of suspended graphene for NEMS applications.

chemical vapor deposition

suspended

transfer-free

graphene

Author

Niclas Lindvall

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Jie Sun

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Avgust Yurgens

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. NEMS 2012, Kyoto, 5 - 8 March 2012

19-22

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Infrastructure

Nanofabrication Laboratory

Subject Categories

Chemical Sciences

DOI

10.1109/NEMS.2012.6196713

ISBN

978-146731124-3

More information

Created

10/7/2017