Towards transfer-free fabrication of graphene NEMS grown by chemical vapour deposition
Journal article, 2012

Graphene, an atomic monolayer of sp(2)-hybridised carbon atoms, is a promising material for future NEMS based on its remarkable electronic and mechanical properties. Through the rapid progress of chemical vapour deposition of large-scale, high-quality graphene, these applications seem to be close to reality. However, issues related to the graphene transfer process limit the reproducibility of such devices. In this Letter, the authors present two different approaches for fabricating suspended graphene devices without any transfer step, using both catalytically and non-catalytically grown graphene. The authors achieve high reproducibility in manufacturing flat and uniform suspended graphene beams. While good mechanical properties are observed, the electrical performance is still poor, requiring improvements.

high-quality

carbon

monolayer graphene

transistors

resonators

single-layer graphene

films

Author

Niclas Lindvall

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Jie Sun

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

O.F.M.Abdul Galib

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Avgust Yurgens

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Micro and Nano Letters

1750-0443 (ISSN)

Vol. 7 8 749-752

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Infrastructure

Nanofabrication Laboratory

Subject Categories

Chemical Sciences

DOI

10.1049/mnl.2012.0211

More information

Created

10/7/2017